| Presentation | 2000/3/3 Development of Fine-Patterning Method for Organic EL Devices using Metal Mask Sliding in Vacuum Vapor Deposition. Koji Utsugi, Masashi Tamegai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated a metal mask sliding system for the fine patterning of lateral three-color(RGB)emitters in multi color organic EL devices based on vacuum-deposited thin films. The system has an XY stage which consists of plate-spring structure that enables the metal mask to slide minutely, with the sliding carefully controlled by DC servo motors. We were able to obtain multi color organic EL devices of 240 x 100 dots by the newly developed metal mask sliding system. The pitch of RGB film pixels was 99 μm horizontally and 100 μm vertically. The emissive area was about 26 μm x 75 μm in the sub-pixels and aperture ratio was about 60%. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | organic EL device / fine pixel / fine patterning / metal mask / vacuum-deposited thin film |
| Paper # | EID99-166,OME99-125 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2000/3/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Fine-Patterning Method for Organic EL Devices using Metal Mask Sliding in Vacuum Vapor Deposition. |
| Sub Title (in English) | |
| Keyword(1) | organic EL device |
| Keyword(2) | fine pixel |
| Keyword(3) | fine patterning |
| Keyword(4) | metal mask |
| Keyword(5) | vacuum-deposited thin film |
| 1st Author's Name | Koji Utsugi |
| 1st Author's Affiliation | Functional Materials Research Laboratories, NEC Corporation() |
| 2nd Author's Name | Masashi Tamegai |
| 2nd Author's Affiliation | R&D Planning and Technical Service Division, NEC Corporation |
| Date | 2000/3/3 |
| Paper # | EID99-166,OME99-125 |
| Volume (vol) | vol.99 |
| Number (no) | 664 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |