| Presentation | 1998/7/3 Surface Acoustic Wave Motor with a Silicon Slider Minoru Kuribayashi KUROSAWA, Naoki OSAKABE, Keiichiro TOJO, Masaya TAKASAKI, Toshiro HIGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes an application of surface acoustic wave(SAW)device to an ultrasonic linea motor.A merit of SAW device is high energy density and small size.But driving frequency is around 10 MHz or higher.In spite of the difficulty of high frequency, the high energy density is attractive for actuators.The SAW linear motor's no-load speed and maximum output force were 1.1m/sec and 3.5 N using a silicon slider.The silicon slider dimensions were 4x4x0.3 mm^3.We made a lot of 30 micron diameter projections on the silicon surface.The acceleration was 1000m/sec^2 and response frequency was 130 kHz or more.The 40 nm step motion was achieved.The SAW motor is expected to be high speed, quick response, and high resolution micro actuator.The most significant problem was the high voltage of the driving.For the previous experiments, we required more than 100 V, due to the primitive design of the driving electorode.Our new designed electrode proved that the driving voltage was reduced less than 10 V to excite the traveling wave. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | linear motor / ultrasonic motor / micro actuator / friction drive / sureface acoustic wave / SAW device |
| Paper # | US98-33,EMD98-25,CPM98-57,OME98-55 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 1998/7/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface Acoustic Wave Motor with a Silicon Slider |
| Sub Title (in English) | |
| Keyword(1) | linear motor |
| Keyword(2) | ultrasonic motor |
| Keyword(3) | micro actuator |
| Keyword(4) | friction drive |
| Keyword(5) | sureface acoustic wave |
| Keyword(6) | SAW device |
| 1st Author's Name | Minoru Kuribayashi KUROSAWA |
| 1st Author's Affiliation | Dept.of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo() |
| 2nd Author's Name | Naoki OSAKABE |
| 2nd Author's Affiliation | Dept.of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo |
| 3rd Author's Name | Keiichiro TOJO |
| 3rd Author's Affiliation | Dept.of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo |
| 4th Author's Name | Masaya TAKASAKI |
| 4th Author's Affiliation | Dept.of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo |
| 5th Author's Name | Toshiro HIGUCHI |
| 5th Author's Affiliation | Dept.of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo |
| Date | 1998/7/3 |
| Paper # | US98-33,EMD98-25,CPM98-57,OME98-55 |
| Volume (vol) | vol.98 |
| Number (no) | 164 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |