| Presentation | 1998/7/3 PZT Thin Film deposited by Hydrothermal Method for Actuators & Sensors : Micro ultrasonic motor, Tactile sensor, Earphone for hearing aid Takeshi MORITA, Takefumi KANDA, Hidehiko YASUI, Minoru K. KUROSAWA, Toshiro HIGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Hydrothermal method is a unique method to deposit PZT thin film using chemical reaction between titanium substrate and solution.For its application devices, we fabricated a micro ultrasonic motor, a tactile sensor and an earphone for hearing aid.The micro ultrasonic motor was 1.4mm in diameter and revolution speed was 600rpm.The resolution of the tactile sensor was 66nm.This sensor had possibility for being used in the liquid.The earphone for hearing aid generated 60dB sound pressure with 1.3Vrpm.Now we are trying to improve these performances by investigating reaction conditions of hydrothermal method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hydrothermal method / PZT thin film / micro ultrasonic motor / tactile sensor / earphone for heaing aid |
| Paper # | US98-29,EMD98-21,CPM98-53,OME98-51 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 1998/7/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | PZT Thin Film deposited by Hydrothermal Method for Actuators & Sensors : Micro ultrasonic motor, Tactile sensor, Earphone for hearing aid |
| Sub Title (in English) | |
| Keyword(1) | hydrothermal method |
| Keyword(2) | PZT thin film |
| Keyword(3) | micro ultrasonic motor |
| Keyword(4) | tactile sensor |
| Keyword(5) | earphone for heaing aid |
| 1st Author's Name | Takeshi MORITA |
| 1st Author's Affiliation | The Univ.of Tokyo, Fact.of Eng., Dept.of Prec.Mach.Eng.() |
| 2nd Author's Name | Takefumi KANDA |
| 2nd Author's Affiliation | The Univ.of Tokyo, Fact.of Eng., Dept.of Prec.Mach.Eng. |
| 3rd Author's Name | Hidehiko YASUI |
| 3rd Author's Affiliation | The Univ.of Tokyo, Fact.of Eng., Dept.of Prec.Mach.Eng. |
| 4th Author's Name | Minoru K. KUROSAWA |
| 4th Author's Affiliation | The Univ.of Tokyo, Fact.of Eng., Dept.of Prec.Mach.Eng. |
| 5th Author's Name | Toshiro HIGUCHI |
| 5th Author's Affiliation | The Univ.of Tokyo, Fact.of Eng., Dept.of Prec.Mach.Eng. |
| Date | 1998/7/3 |
| Paper # | US98-29,EMD98-21,CPM98-53,OME98-51 |
| Volume (vol) | vol.98 |
| Number (no) | 164 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |