Presentation	1994/9/9 Fabrication and Characterization of Organic Ultra-thin Film by Molecular Beam Deposition Toshihisa Nonaka,
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Abstract(in Japanese)	(See Japanese page)
Abstract(in English)	Cu-phthalocyanine(CuPc)and Mg-Phthalocyanine(MgPc)were alternatively deposited on Si substrates by organic molecular beam deposition(OMBD).The thickness of each layer was varied in the range between 3.0 and 10.0 nm.The layered structure of the film was confirmed by secondary ion mass spectrometry(SIMS)depth profiling and cross sectional observations with a transmission electron microscope(TEM).The molecular orientation within a film was estimated by Fourier-transform infrared spectroscopy(FT-IR). The measurements suggested that the planar molecules of CuPc and MgPc were inclined at an angle of 22° with respect to the substrat e surface.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	Molecular Beam Deposition / Phthalocyanine / SIMS / TEM
Paper #	OME94-49
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Conference Information
Committee	OME
Conference Date	1994/9/9(1days)
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Paper Information
Registration To	Organic Material Electronics (OME)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Fabrication and Characterization of Organic Ultra-thin Film by Molecular Beam Deposition
Sub Title (in English)
Keyword(1)	Molecular Beam Deposition
Keyword(2)	Phthalocyanine
Keyword(3)	SIMS
Keyword(4)	TEM
1st Author's Name	Toshihisa Nonaka
1st Author's Affiliation	Toray Ind.Inc.,()
Date	1994/9/9
Paper #	OME94-49
Volume (vol)	vol.94
Number (no)	225
Page	pp.pp.-
#Pages	6
Date of Issue