| Presentation | 1994/3/18 Scanning Maxwell Stress Microscopy (SMM) : Toward Electrical Characterizations of Nanostructure Devices and Materials Hiroshi Yokoyama, Takahito Inoue, J.Jeffery Mark, Junji Itoh, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Scanning Maxwell stress microscope (SMM) is a novel scanning probe microscope which is capable of detecting a minute elctric force (Maxwell stress) actingon the probe tip,based on the same principle as that employed by the conventional atomic force microscope.An alternating voltage comprised of multiple frequency components is applied to the tip,while keeping the tip away from the sample by a certain gap to achive the so-call non-contact operation.And the resultant oscilations of the tip are detected and frequency-analyzed to get simultatneous information about the topography,surface potential and charge,and the dielectric constant of a thin film and its high frequency dispersion with a nanometer range resolution.The SMM is expected to serve as a powerful microanalytical technique for electrical characterization of nanostructure electric devices and materials. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Scanning probe microscope / Maxwell stress / Atmic force microscope / surface potential / Dielectric dispersion |
| Paper # | OME93-54 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 1994/3/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Scanning Maxwell Stress Microscopy (SMM) : Toward Electrical Characterizations of Nanostructure Devices and Materials |
| Sub Title (in English) | |
| Keyword(1) | Scanning probe microscope |
| Keyword(2) | Maxwell stress |
| Keyword(3) | Atmic force microscope |
| Keyword(4) | surface potential |
| Keyword(5) | Dielectric dispersion |
| 1st Author's Name | Hiroshi Yokoyama |
| 1st Author's Affiliation | Electrotechnical Laboratory() |
| 2nd Author's Name | Takahito Inoue |
| 2nd Author's Affiliation | Electrotechnical Laboratory |
| 3rd Author's Name | J.Jeffery Mark |
| 3rd Author's Affiliation | Electrotechnical Laboratory |
| 4th Author's Name | Junji Itoh |
| 4th Author's Affiliation | Electrotechnical Laboratory |
| Date | 1994/3/18 |
| Paper # | OME93-54 |
| Volume (vol) | vol.93 |
| Number (no) | 524 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |