Presentation 1995/7/26
Direct Measurements of Organic Molecular Beams by Q-mass.
Yuji Yoshida, Nobutaka Tanigaki, Kiyoshi Yase,
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Abstract(in English) In order to elucidate evaporation process of organic molecular beam deposition (OMBD) technique, the molecular flux and its dependence on the Knudsen-cell temperature, are directly measured by using a high performance quadrupole mass spectrometer in an ultra high vacuum. Functional organic materials such as metal phthalocyanine (M=Cu, Ni, Pb and TiO), Tris(8-hydroxyquinoline) aluminum (Alq3), Triphenyl diamine (TPD) and fullerene (C60), are sublimed from the K-cell precisely controlled the temperature. The mass spectrum revealed that each molecule was sublimed from K-cell without any thermal decomposition. The dependence of evaporation rate on the temperature of K-cell has been, for the first time, numerically calibrated the thermodynamical enthalpy for sublimation as a basic and important factor.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) OMBD / Functional organic materials / Sublimation / Enthalpy / Q-mass
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Committee OME
Conference Date 1995/7/26(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Direct Measurements of Organic Molecular Beams by Q-mass.
Sub Title (in English)
Keyword(1) OMBD
Keyword(2) Functional organic materials
Keyword(3) Sublimation
Keyword(4) Enthalpy
Keyword(5) Q-mass
1st Author's Name Yuji Yoshida
1st Author's Affiliation Department of Polymer Physics, National Institute of Materials and Chemical Research()
2nd Author's Name Nobutaka Tanigaki
2nd Author's Affiliation Department of Polymer Physics, National Institute of Materials and Chemical Research
3rd Author's Name Kiyoshi Yase
3rd Author's Affiliation Department of Polymer Physics, National Institute of Materials and Chemical Research
Date 1995/7/26
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Volume (vol) vol.95
Number (no) 187
Page pp.pp.-
#Pages 7
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