| Presentation | 1997/1/28 100 nm ultra fine pattern etching by a polyimide interface transmitted electron beam excited ICP Tomoya Yamada, Shinji Ogawa, Ryouichi Inanami, Shinzou Morita, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Electron-beam excited plasma (EBEP),where the electron-beam was transmitted through the interface and excited the gas molecules has been developing. The transmitted electron-beam was increased up to about 3 mA by using polyimide as an interface material but the plasma couldn't be ignited only by the electron-beam. So the plasma was induced by superinposing the electron-beam and the inductively coupled plasma (ICP) and a etching through 100 nm resist pattern was performed successfuly. Electron temperature was higher when electron-beam was irradiated from the result of probe mesurement. This suggests that the electron-beam contribute to the maintainance of steady discharge of low RF power. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EBEP / Polyimide interface / 100 nm etching / probe measurement / increase of electron temperature |
| Paper # | OME96-86 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
|---|---|
| Conference Date | 1997/1/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 100 nm ultra fine pattern etching by a polyimide interface transmitted electron beam excited ICP |
| Sub Title (in English) | |
| Keyword(1) | EBEP |
| Keyword(2) | Polyimide interface |
| Keyword(3) | 100 nm etching |
| Keyword(4) | probe measurement |
| Keyword(5) | increase of electron temperature |
| 1st Author's Name | Tomoya Yamada |
| 1st Author's Affiliation | Center for cooperative research in advanced science and technology, Nagoya University() |
| 2nd Author's Name | Shinji Ogawa |
| 2nd Author's Affiliation | Center for cooperative research in advanced science and technology, Nagoya University |
| 3rd Author's Name | Ryouichi Inanami |
| 3rd Author's Affiliation | Center for cooperative research in advanced science and technology, Nagoya University |
| 4th Author's Name | Shinzou Morita |
| 4th Author's Affiliation | Center for cooperative research in advanced science and Technology, Nagoya University |
| Date | 1997/1/28 |
| Paper # | OME96-86 |
| Volume (vol) | vol.96 |
| Number (no) | 502 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |