Presentation | 1997/6/27 NO_x sensors using multi-layer semiconducting thin-film Tadao Hiwatari, Kazuhiro Hara, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed NO_x sensors using multi-layer semiconducting thin-film. These sensors have a double layer structure composed of metal oxides; the first layer is Fe_2O_3-based thin film which serves as a current conduction region and the second layer is SnO_2-based thin film which is concerned with adsorption, reaction and desorption of gases. The sensors are found to be sensitive to both NO and NO_2 gases. By doping Pd(4mol%) to SnO_2 layer, the sensitivity increases. These sensors detects NO_x at a concentration as low as a few ppm at a relatively low temperature of 250℃. The sensors work for 3months without deterioration by ocasional heat cleaning. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | NO_x sensor / gas sensor / thin-film / Fe_2O_3 / SnO_2 |
Paper # | CPM97-38 |
Date of Issue |
Conference Information | |
Committee | OME |
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Conference Date | 1997/6/27(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | NO_x sensors using multi-layer semiconducting thin-film |
Sub Title (in English) | |
Keyword(1) | NO_x sensor |
Keyword(2) | gas sensor |
Keyword(3) | thin-film |
Keyword(4) | Fe_2O_3 |
Keyword(5) | SnO_2 |
1st Author's Name | Tadao Hiwatari |
1st Author's Affiliation | College of Engineering, Tokyo Denki University() |
2nd Author's Name | Kazuhiro Hara |
2nd Author's Affiliation | College of Engineering, Tokyo Denki University |
Date | 1997/6/27 |
Paper # | CPM97-38 |
Volume (vol) | vol.97 |
Number (no) | 144 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |