Presentation | 1997/7/4 The applications of PZT thin film deposited by hydrothermal methods Takeshi MORITA, Takefumi KANDA, Minoru KUROSAWA, Toshiro HIGUCHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | This paper proposes the applications using PZT thin film deposited by hydrothermal method. Hydrothermal method utilizes the chemical reaction between titanium base metal and the ions melted in the solution at high temperature. So curved shaped base metals are available. We have succeeded in fabricating micro ultrasonic motor and tactile sensors by hydrothermal method. The motor dimension is 2.4mm in diameter and 10mm long. The output torque was 7μNm and the maximum revolution speed was 880 rpm at 15Vp-p driving voltage. The sensor is 27.8mm long. Its resonance frequency is 115kHz. We have succeeded in sensing contact and the resolution is 1μm. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Hydrothermal method / PZT thin film / micro ultrasonic motor / tactile sensor |
Paper # | OME97-51 |
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Conference Information | |
Committee | OME |
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Conference Date | 1997/7/4(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | The applications of PZT thin film deposited by hydrothermal methods |
Sub Title (in English) | |
Keyword(1) | Hydrothermal method |
Keyword(2) | PZT thin film |
Keyword(3) | micro ultrasonic motor |
Keyword(4) | tactile sensor |
1st Author's Name | Takeshi MORITA |
1st Author's Affiliation | The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng.() |
2nd Author's Name | Takefumi KANDA |
2nd Author's Affiliation | The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng. |
3rd Author's Name | Minoru KUROSAWA |
3rd Author's Affiliation | The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng. |
4th Author's Name | Toshiro HIGUCHI |
4th Author's Affiliation | The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng. |
Date | 1997/7/4 |
Paper # | OME97-51 |
Volume (vol) | vol.97 |
Number (no) | 151 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |