| Presentation | 2002/9/23 TCAD Driven Process Design of Fully-Depleted SOI Transistor Noriyuki MIURA, Hirotaka KOMATSUBARA, Marie MOCHIZUKI, Hirokazu HAYASHI, Koichi FUKUDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We present a TCAD-driven total design methodology of FD-SOI MOSFETs, starting from 0.35 um/2.5V shrinking to 0.15 um/1.5 V. Jumping from 0.35 um to 0.15 um, two-phase experiments are performed effectively supported by exhaustive applications of TCAD local models. SOI specific consideration of SOI film thickness variations (oTsoi) and floating-body effects are the key points for the TCAD driven strategy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Fully-depleted SOI / Parasitic channel leakage / Parasitic resistance / Floating-body effect / Low power |
| Paper # | VLD2002-66 |
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| Conference Information | |
| Committee | VLD |
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| Conference Date | 2002/9/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | TCAD Driven Process Design of Fully-Depleted SOI Transistor |
| Sub Title (in English) | |
| Keyword(1) | Fully-depleted SOI |
| Keyword(2) | Parasitic channel leakage |
| Keyword(3) | Parasitic resistance |
| Keyword(4) | Floating-body effect |
| Keyword(5) | Low power |
| 1st Author's Name | Noriyuki MIURA |
| 1st Author's Affiliation | System LSI Research Division, Silicon Solutions Company, Oki Electric Industry Co., Ltd.() |
| 2nd Author's Name | Hirotaka KOMATSUBARA |
| 2nd Author's Affiliation | System LSI Research Division, Silicon Solutions Company, Oki Electric Industry Co., Ltd. |
| 3rd Author's Name | Marie MOCHIZUKI |
| 3rd Author's Affiliation | System LSI Research Division, Silicon Solutions Company, Oki Electric Industry Co., Ltd. |
| 4th Author's Name | Hirokazu HAYASHI |
| 4th Author's Affiliation | System LSI Research Division, Silicon Solutions Company, Oki Electric Industry Co., Ltd. |
| 5th Author's Name | Koichi FUKUDA |
| 5th Author's Affiliation | System LSI Research Division, Silicon Solutions Company, Oki Electric Industry Co., Ltd. |
| Date | 2002/9/23 |
| Paper # | VLD2002-66 |
| Volume (vol) | vol.102 |
| Number (no) | 344 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |