| Presentation | 2000/9/15 Challenges on Modeling & Simulation for Sub-100nm Technology Node Norihiko KOTANI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The miniaturization of device structure for LSIs that are the key components of information technology(IT)is going to be accelerated. As the technology node of 100nm becomes realistic, it is considered that the development of huge integrated LSIs becomes impossible without the simultaneous optimization of design and process. Therefore the technology and the design system for taking the process information prior to the process fixture and using them to design are needed. Process information is needed at the early stage of design, so that simulation is desired to take the information as early as possible. Since simulation is based on theories and algorithme, we have to consider both modeling and simulator. Many challenges should be tried not only about new physical and chemical models, numerical calculation, and software platform to verify the results of research and development but also about creating circumstances for research and development. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | simulation / modeling / process simulator / device simulator / circuit simulator / equipment simulator / compact model |
| Paper # | VLD2000-62,SDM2000-135 |
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| Conference Information | |
| Committee | VLD |
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| Conference Date | 2000/9/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Challenges on Modeling & Simulation for Sub-100nm Technology Node |
| Sub Title (in English) | |
| Keyword(1) | simulation |
| Keyword(2) | modeling |
| Keyword(3) | process simulator |
| Keyword(4) | device simulator |
| Keyword(5) | circuit simulator |
| Keyword(6) | equipment simulator |
| Keyword(7) | compact model |
| 1st Author's Name | Norihiko KOTANI |
| 1st Author's Affiliation | ULSI Development Center, Mitsubishi Electric Co.() |
| Date | 2000/9/15 |
| Paper # | VLD2000-62,SDM2000-135 |
| Volume (vol) | vol.100 |
| Number (no) | 294 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |