| Presentation | 1999/8/27 Development of TCAD framework for Process Optimization Akiko Kuramitsu, Kanji Ohara, Keiji Okuma, Mutsumi Kobayashi, Satoe Minami, Yoshinori Oda, Keishi Kuroda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed an integrated TCAD framework for TAT (Turn-Around-Time) reduction and optimization of VLSI process parameters. The integrated TCAD system is realized for efficient optimized process design due to the implementation of various statistical methodologies (DOE, ANOVA, RSM...) and robust optimization engine. This system is constructed by mainly GUI (Graphical User Interface) and can be used on multi-platform (EWS, PC) by using intra-net effectively, and is also connected with CIM data base system to suppress the data conversion procedure from run-sheets. Optimization of the Hot-Carrier characteristics has been presented as the example. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Design of Experiments / Succecive quadratic Programming / Optimization |
| Paper # | VLD99-60 |
| Date of Issue |
| Conference Information | |
| Committee | VLD |
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| Conference Date | 1999/8/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of TCAD framework for Process Optimization |
| Sub Title (in English) | |
| Keyword(1) | Design of Experiments |
| Keyword(2) | Succecive quadratic Programming |
| Keyword(3) | Optimization |
| 1st Author's Name | Akiko Kuramitsu |
| 1st Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics() |
| 2nd Author's Name | Kanji Ohara |
| 2nd Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| 3rd Author's Name | Keiji Okuma |
| 3rd Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| 4th Author's Name | Mutsumi Kobayashi |
| 4th Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| 5th Author's Name | Satoe Minami |
| 5th Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| 6th Author's Name | Yoshinori Oda |
| 6th Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| 7th Author's Name | Keishi Kuroda |
| 7th Author's Affiliation | ULSI Process Technology Development Center Semikonductor Company, Matsushita Electronics |
| Date | 1999/8/27 |
| Paper # | VLD99-60 |
| Volume (vol) | vol.99 |
| Number (no) | 262 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |