Presentation 1998/10/23
High Voltage MOS Device Modeling with BSIM3v3 and its Parameter Extraction Technique
T. Myono, S. Kikuchi, K. Iwatsu, E. Nishibe, T. Suzuki, Y. Sasaki, K. Itoh, H. Kobayashi,
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Abstract(in English) This paper presents a new technique for modeling High-Voltage(HV)MOS devices accurately with the BSIM3v3 SPICE model. Standard SPICE models do not model the voltage dependency of R_s and R_d in HV MOS devices ; this causes large discrepancies between the simulated and measured I-V characteristics of HV MOS devices. We propose to assign physical meanings and values different from the original BSIM3v3 model to three of its parameters to represent the voltage dependency of R_s and R_d. With this method, we have succeeded in highly accurate parameter extraction and the simulated I-V characteristics of HV MOS divices using the extracted parameters match the measured results well. The relationship between the proposed modeling technique and the physical mechanism of HV MOS devices is also discussed based on measured and device simulation results.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) High-voltage MOS / BSIM3 / SPICE model / Modeling
Paper # VLD98-97,ED98-122,SDM98-158,ICD98-228
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Conference Information
Committee VLD
Conference Date 1998/10/23(1days)
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Registration To VLSI Design Technologies (VLD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High Voltage MOS Device Modeling with BSIM3v3 and its Parameter Extraction Technique
Sub Title (in English)
Keyword(1) High-voltage MOS
Keyword(2) BSIM3
Keyword(3) SPICE model
Keyword(4) Modeling
1st Author's Name T. Myono
1st Author's Affiliation MOS-LSI Division, SANYO Electric Co., Ltd.()
2nd Author's Name S. Kikuchi
2nd Author's Affiliation MOS-LSI Division, SANYO Electric Co., Ltd.
3rd Author's Name K. Iwatsu
3rd Author's Affiliation MOS-LSI Division, SANYO Electric Co., Ltd.
4th Author's Name E. Nishibe
4th Author's Affiliation MOS-LSI Division, SANYO Electric Co., Ltd.
5th Author's Name T. Suzuki
5th Author's Affiliation MOS-LSI Division, SANYO Electric Co., Ltd.
6th Author's Name Y. Sasaki
6th Author's Affiliation Gunma University
7th Author's Name K. Itoh
7th Author's Affiliation Gunma University
8th Author's Name H. Kobayashi
8th Author's Affiliation Gunma University
Date 1998/10/23
Paper # VLD98-97,ED98-122,SDM98-158,ICD98-228
Volume (vol) vol.98
Number (no) 346
Page pp.pp.-
#Pages 8
Date of Issue