| Presentation | 1998/10/23 The Examination of Validity of the Effective Chanel Length Extraction Method with TCAD Makoto Kidera, Motoaki Tanizawa, Kiyoshi Ishikawa, TAdashi Nishimura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ΔL is the one of the main factors that decide the device's performance. the ΔL is used for E-T data[5]in the process monitor. The gate voltage modulates the extrinsic resistance, so the ΔL depends on the gate voltage. When the device is the LDD structure, the capacitance based method has dependence on the gate voltage. So it is difficult to extract device's own ΔL. This paper describes the method that adopts the maximum value in the ΔL-Vgs charcteristic as the ΔL. This method does not need to decide the gate voltage for the extraction point. So this method is effective to extract ΔL in the process monitoring. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Effective Chanel Length / Parameter Extraction / Process Monitor / Circuit Simulation |
| Paper # | VLD98-91,ED98-116,SDM98-152,ICD98-222 |
| Date of Issue |
| Conference Information | |
| Committee | VLD |
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| Conference Date | 1998/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Examination of Validity of the Effective Chanel Length Extraction Method with TCAD |
| Sub Title (in English) | |
| Keyword(1) | Effective Chanel Length |
| Keyword(2) | Parameter Extraction |
| Keyword(3) | Process Monitor |
| Keyword(4) | Circuit Simulation |
| 1st Author's Name | Makoto Kidera |
| 1st Author's Affiliation | Mitsubishi Electric Corporation ULSI Development Center() |
| 2nd Author's Name | Motoaki Tanizawa |
| 2nd Author's Affiliation | Mitsubishi Electric Corporation ULSI Development Center |
| 3rd Author's Name | Kiyoshi Ishikawa |
| 3rd Author's Affiliation | Mitsubishi Electric Corporation ULSI Development Center |
| 4th Author's Name | TAdashi Nishimura |
| 4th Author's Affiliation | Mitsubishi Electric Corporation ULSI Development Center |
| Date | 1998/10/23 |
| Paper # | VLD98-91,ED98-116,SDM98-152,ICD98-222 |
| Volume (vol) | vol.98 |
| Number (no) | 346 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |