| Presentation | 1998/10/23 Simulation Analysis of SCM Measurements K Matsuzawa, Y Oowaki, M Nakamura, N Aoki, I Mizushima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The accuracy of SCM(scanning capacitance microscopy)in two-dimensional impurity profiling for an nMOSFET has been evaluated by measurements and process/device simulations. It is revealed that SCM signals could be modulated by the carrier depletion in the pn junction, an edge effect at the Si substrate edge, and the work function of the gate electrode. The SCM is shown to give the depth and lateral extent of impurity profile at least for the single source/drain diffusion layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SCM / simulation |
| Paper # | VLD98-90,ED98-115,SDM98-151,ICD98-221 |
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| Conference Information | |
| Committee | VLD |
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| Conference Date | 1998/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simulation Analysis of SCM Measurements |
| Sub Title (in English) | |
| Keyword(1) | SCM |
| Keyword(2) | simulation |
| 1st Author's Name | K Matsuzawa |
| 1st Author's Affiliation | Advanced Semiconductor Devices Research Laboratories, Toshiba Corporation() |
| 2nd Author's Name | Y Oowaki |
| 2nd Author's Affiliation | Advanced Semiconductor Devices Research Laboratories, Toshiba Corporation |
| 3rd Author's Name | M Nakamura |
| 3rd Author's Affiliation | Surface Science Laboratories, Toray Research Center, Inc. |
| 4th Author's Name | N Aoki |
| 4th Author's Affiliation | Microelectronics Engineering Laboratories, Toshiba Corporation |
| 5th Author's Name | I Mizushima |
| 5th Author's Affiliation | Microelectronics Engineering Laboratories, Toshiba Corporation |
| Date | 1998/10/23 |
| Paper # | VLD98-90,ED98-115,SDM98-151,ICD98-221 |
| Volume (vol) | vol.98 |
| Number (no) | 346 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |