| Presentation | 1998/10/23 A New Model of Phosphorus Distribution in the SOI Structure T Ishiyama, S Matsumoto, T Sakai, T yachi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We studied phosphorus distribution in the SOI structure and proposed a phosphorus distribution model after anneal, that can explain pile-up in the SOI structure. Simulation results using the proposed model showed its usefulness in estimating the phsphorus concentrations in the SOI structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | phosphorus / pile-up / simulation / dopant / anneal / profile |
| Paper # | VLD98-89,ED98-114,SDM98-150,ICD98-220 |
| Date of Issue |
| Conference Information | |
| Committee | VLD |
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| Conference Date | 1998/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A New Model of Phosphorus Distribution in the SOI Structure |
| Sub Title (in English) | |
| Keyword(1) | phosphorus |
| Keyword(2) | pile-up |
| Keyword(3) | simulation |
| Keyword(4) | dopant |
| Keyword(5) | anneal |
| Keyword(6) | profile |
| 1st Author's Name | T Ishiyama |
| 1st Author's Affiliation | NTT Integrated Information & Energy Systems Laboratories() |
| 2nd Author's Name | S Matsumoto |
| 2nd Author's Affiliation | NTT Integrated Information & Energy Systems Laboratories |
| 3rd Author's Name | T Sakai |
| 3rd Author's Affiliation | NTT Integrated Information & Energy Systems Laboratories |
| 4th Author's Name | T yachi |
| 4th Author's Affiliation | NTT Integrated Information & Energy Systems Laboratories |
| Date | 1998/10/23 |
| Paper # | VLD98-89,ED98-114,SDM98-150,ICD98-220 |
| Volume (vol) | vol.98 |
| Number (no) | 346 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |