| Presentation | 1998/10/23 Profile Measurement and Simulation of Impurity Diffusion in SOI Substrate Yasushi Ieki, Hiroshi Asai, Hideo Uchida, Masaya Ichimura, Chunlin Shao, Eisuke Arai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper reports profile measurement methods of diffused impurity profile and simulation parameters of phosphorus diffusion in SOI substrates. At first, we compared three measurement methods(SIMS, Spreading resistance(SR), 4point probe/anodic oxidation). In SR method, we discuss the relationship between SR and junction depth. Using measured phosphorus diffusion profiles, the main diffusion parameters involved in the phosphorus-point defect pair diffusion model are determined as follows : f_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI / simulation / SR method / phosphorus diffusion / point defect / pair diffusion model |
| Paper # | VLD98-88,ED98-113,SDM98-149,ICD98-219 |
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| Conference Information | |
| Committee | VLD |
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| Conference Date | 1998/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Profile Measurement and Simulation of Impurity Diffusion in SOI Substrate |
| Sub Title (in English) | |
| Keyword(1) | SOI |
| Keyword(2) | simulation |
| Keyword(3) | SR method |
| Keyword(4) | phosphorus diffusion |
| Keyword(5) | point defect |
| Keyword(6) | pair diffusion model |
| 1st Author's Name | Yasushi Ieki |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology() |
| 2nd Author's Name | Hiroshi Asai |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 3rd Author's Name | Hideo Uchida |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 4th Author's Name | Masaya Ichimura |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 5th Author's Name | Chunlin Shao |
| 5th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 6th Author's Name | Eisuke Arai |
| 6th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| Date | 1998/10/23 |
| Paper # | VLD98-88,ED98-113,SDM98-149,ICD98-219 |
| Volume (vol) | vol.98 |
| Number (no) | 346 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |