| Presentation | 1998/10/23 A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model Hironori Sakamoto, Shigetaka Kumashiro, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A systematic and physically based method of extracting a unified parameter set for a point-defect diffusion model is proposed. A sensitivity matrix analysis is used to construct the sequence of the extraction and to select the data set to be fitted. The parameters were classified into four categories according to their extraction priorities, and were extracted one by one so that the simulation results should agree with the measured 1D profiles. Electrical characteristics of actual devices were calculated by using a 2D simulator, and it was shown that the extracted unified parameters can be applicable to various process conditions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Process simulation / Point-defect diffusion model / Parameter extraction / Unified parameter set |
| Paper # | VLD98-86,ED98-111,SDM98-147,ICD98-217 |
| Date of Issue |
| Conference Information | |
| Committee | VLD |
|---|---|
| Conference Date | 1998/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model |
| Sub Title (in English) | |
| Keyword(1) | Process simulation |
| Keyword(2) | Point-defect diffusion model |
| Keyword(3) | Parameter extraction |
| Keyword(4) | Unified parameter set |
| 1st Author's Name | Hironori Sakamoto |
| 1st Author's Affiliation | ULSI Device Development Laboratories, NEC Corporation() |
| 2nd Author's Name | Shigetaka Kumashiro |
| 2nd Author's Affiliation | ULSI Device Development Laboratories, NEC Corporation |
| Date | 1998/10/23 |
| Paper # | VLD98-86,ED98-111,SDM98-147,ICD98-217 |
| Volume (vol) | vol.98 |
| Number (no) | 346 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |