Presentation 1998/10/22
An Analytical Study of Stochastic Signal Models Applied to Dry Vacuum Pump In-Service Life Prediction in the Ultimate Term of Non-Stationary Over Loading
Satoshi Konishi, Arihiro Ishida, Toshirou Satoh, Kiyohito Yamasawa,
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Abstract(in English) We have studied the possibility of prediction for the in-service life(abbreviated as ISL, hereinafter)of dry pumps from the unstable non-stationary motor current which is observed before over-load pump stopping. A model describing the data as-measured(i.e.non-stationary model)and stationary models converted from the non-stationary one have been evaluated. The data were obtained from an accelerated test performed under TEOS process. It has been found that the stationary models can predict ISL in more stable manner than the non-stationary ones. According to the analytical result of each model, it is concluded that, in the view of practice of ISL prediction, the importance is at the selection of models that leads to stable prediction resulting in high certainty of ISL prediction.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Dry Vacuum Pump / In-Service Life Prediction / Stochastic Signal Model / Stable Prediction
Paper # VLD98-78,ED98-103,SDM98-139,ICD98-209
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Committee VLD
Conference Date 1998/10/22(1days)
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Registration To VLSI Design Technologies (VLD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) An Analytical Study of Stochastic Signal Models Applied to Dry Vacuum Pump In-Service Life Prediction in the Ultimate Term of Non-Stationary Over Loading
Sub Title (in English)
Keyword(1) Dry Vacuum Pump
Keyword(2) In-Service Life Prediction
Keyword(3) Stochastic Signal Model
Keyword(4) Stable Prediction
1st Author's Name Satoshi Konishi
1st Author's Affiliation Nippon Edwards K.K.()
2nd Author's Name Arihiro Ishida
2nd Author's Affiliation Dept.of Electorical and Electronic Engrg., Shinshu University
3rd Author's Name Toshirou Satoh
3rd Author's Affiliation Dept.of Electorical and Electronic Engrg., Shinshu University
4th Author's Name Kiyohito Yamasawa
4th Author's Affiliation Dept.of Electorical and Electronic Engrg., Shinshu University
Date 1998/10/22
Paper # VLD98-78,ED98-103,SDM98-139,ICD98-209
Volume (vol) vol.98
Number (no) 345
Page pp.pp.-
#Pages 11
Date of Issue