Presentation | 1996/9/27 Physical model for breakdown simulation K. Matsuzawa, Y. Oowaki, N. Aoki, N. Shigyo, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We study the influence of physical models on breakdown simulation. We consider the impact ionization and band-to-band tunneling (BBT) current. For calculation of impact ionization rate, we apply a model unifying surface and bulk ionization rate. For calculation of BBT probability, we use the modified Kane's model. Under on-states, the impact ionization is dominant for accuracy of breakdown simulation. Especially, the unified model is available for single S/D pMOSFET and LDD structures. On the other hand, BBT is dominant under off-states and for field isolation regions. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | breakdown / simulation / impact ionization / band-to-band tunneling |
Paper # | VLD96-47,ED96-93,SDM96-103 |
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Conference Information | |
Committee | VLD |
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Conference Date | 1996/9/27(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | VLSI Design Technologies (VLD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Physical model for breakdown simulation |
Sub Title (in English) | |
Keyword(1) | breakdown |
Keyword(2) | simulation |
Keyword(3) | impact ionization |
Keyword(4) | band-to-band tunneling |
1st Author's Name | K. Matsuzawa |
1st Author's Affiliation | ULSI Research Laboratories, Toshiba Corporation() |
2nd Author's Name | Y. Oowaki |
2nd Author's Affiliation | ULSI Research Laboratories, Toshiba Corporation |
3rd Author's Name | N. Aoki |
3rd Author's Affiliation | Device Engineering Laboratory, Toshiba Corporaion |
4th Author's Name | N. Shigyo |
4th Author's Affiliation | Device Engineering Laboratory, Toshiba Corporaion |
Date | 1996/9/27 |
Paper # | VLD96-47,ED96-93,SDM96-103 |
Volume (vol) | vol.96 |
Number (no) | 259 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |