Presentation 1996/9/27
Physical model for breakdown simulation
K. Matsuzawa, Y. Oowaki, N. Aoki, N. Shigyo,
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Abstract(in English) We study the influence of physical models on breakdown simulation. We consider the impact ionization and band-to-band tunneling (BBT) current. For calculation of impact ionization rate, we apply a model unifying surface and bulk ionization rate. For calculation of BBT probability, we use the modified Kane's model. Under on-states, the impact ionization is dominant for accuracy of breakdown simulation. Especially, the unified model is available for single S/D pMOSFET and LDD structures. On the other hand, BBT is dominant under off-states and for field isolation regions.
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Keyword(in English) breakdown / simulation / impact ionization / band-to-band tunneling
Paper # VLD96-47,ED96-93,SDM96-103
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Committee VLD
Conference Date 1996/9/27(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Physical model for breakdown simulation
Sub Title (in English)
Keyword(1) breakdown
Keyword(2) simulation
Keyword(3) impact ionization
Keyword(4) band-to-band tunneling
1st Author's Name K. Matsuzawa
1st Author's Affiliation ULSI Research Laboratories, Toshiba Corporation()
2nd Author's Name Y. Oowaki
2nd Author's Affiliation ULSI Research Laboratories, Toshiba Corporation
3rd Author's Name N. Aoki
3rd Author's Affiliation Device Engineering Laboratory, Toshiba Corporaion
4th Author's Name N. Shigyo
4th Author's Affiliation Device Engineering Laboratory, Toshiba Corporaion
Date 1996/9/27
Paper # VLD96-47,ED96-93,SDM96-103
Volume (vol) vol.96
Number (no) 259
Page pp.pp.-
#Pages 6
Date of Issue