| Presentation | 1995/10/27 Precise Control Method in Laser Drawing System for Patterning of Integrated-Optic Switching Circuits Nobuo GOTO, Yasumitsu MIYAZAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Precise patterning of optical waveguides is required in integrated-optic circuits such as acousto-optic matrix switches in order to reduce crosstalks and insertion losses. In this paper, an improvement of photomask patterning is discussed in laser drawing system with stepping motors. Mechanical fluctuation and vibration in xy-stages are experimentally clarified. A PID feedback control of the stages improved the patterning accuracy within±40nm, which is limited by the resolution of deviation measurement. Also, we discuss methods for realizing an accuracy of±5nm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Laser drawing / Precise fabrication / Integrated-optics / Acousto-optic effect / Optical switch / stepping motor |
| Paper # | OCS95-80 |
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| Conference Information | |
| Committee | OCS |
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| Conference Date | 1995/10/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Optical Communication Systems (OCS) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Precise Control Method in Laser Drawing System for Patterning of Integrated-Optic Switching Circuits |
| Sub Title (in English) | |
| Keyword(1) | Laser drawing |
| Keyword(2) | Precise fabrication |
| Keyword(3) | Integrated-optics |
| Keyword(4) | Acousto-optic effect |
| Keyword(5) | Optical switch |
| Keyword(6) | stepping motor |
| 1st Author's Name | Nobuo GOTO |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Yasumitsu MIYAZAKI |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| Date | 1995/10/27 |
| Paper # | OCS95-80 |
| Volume (vol) | vol.95 |
| Number (no) | 343 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |