Presentation 1997/11/5
On Wafer Fabriction Technology of Different-wavelength Light Sources for WDM Application
Koji KUDO, Masashige ISHIZAKA, Tatsuya SASAKI, Hiroyuki YAMAZAKI, Masayuki YAMAGUCHI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We report detuning-adjusted different-wavelength light sources fabricated on a single wafer that can operate uniformly over a wide wavelength range from 1.52-1.59 μm. These light sources were fabricated by using newly developed electron beam (EB) lithography for grating formation and narrow-stripe selective metal-organic vapor phase epitaxy (MOVPE) for adjusting the gain peak of the active layer to the Bragg wavelengths.
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Keyword(in English) WDM / Selective MOVPE / EB lithography / Modulator / DFB lasers / Detuning adjustment
Paper # OCS97-64
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Committee OCS
Conference Date 1997/11/5(1days)
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Registration To Optical Communication Systems (OCS)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) On Wafer Fabriction Technology of Different-wavelength Light Sources for WDM Application
Sub Title (in English)
Keyword(1) WDM
Keyword(2) Selective MOVPE
Keyword(3) EB lithography
Keyword(4) Modulator
Keyword(5) DFB lasers
Keyword(6) Detuning adjustment
1st Author's Name Koji KUDO
1st Author's Affiliation Optoelectronics and High Frequency Device Research Laboratories NEC Corporation()
2nd Author's Name Masashige ISHIZAKA
2nd Author's Affiliation Optoelectronics and High Frequency Device Research Laboratories NEC Corporation
3rd Author's Name Tatsuya SASAKI
3rd Author's Affiliation Optoelectronics and High Frequency Device Research Laboratories NEC Corporation
4th Author's Name Hiroyuki YAMAZAKI
4th Author's Affiliation Optoelectronics and High Frequency Device Research Laboratories NEC Corporation
5th Author's Name Masayuki YAMAGUCHI
5th Author's Affiliation Optoelectronics and High Frequency Device Research Laboratories NEC Corporation
Date 1997/11/5
Paper # OCS97-64
Volume (vol) vol.97
Number (no) 358
Page pp.pp.-
#Pages 6
Date of Issue