Presentation | 1997/11/4 Magnetooptic waveguides on InP substrate by wafer direct bonding technique Hideki YOKOI, Tetsuya MIZUMOTO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Feasibility of wafer direct bonding technique has been investigated for integrating a semiconductor laser diode with an optical isolator. The direct bonding between InP and magnetooptic waveguides with an SiO_2 cladding layer is demonstrated. An etching process of a semiconductor laser diode for integrating the two devices is also described. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | optical isolator / direct bonding / semiconductor laser diode / garnet |
Paper # | OCS97-51 |
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Conference Information | |
Committee | OCS |
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Conference Date | 1997/11/4(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Optical Communication Systems (OCS) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Magnetooptic waveguides on InP substrate by wafer direct bonding technique |
Sub Title (in English) | |
Keyword(1) | optical isolator |
Keyword(2) | direct bonding |
Keyword(3) | semiconductor laser diode |
Keyword(4) | garnet |
1st Author's Name | Hideki YOKOI |
1st Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo Institute of Technology() |
2nd Author's Name | Tetsuya MIZUMOTO |
2nd Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo Institute of Technology |
Date | 1997/11/4 |
Paper # | OCS97-51 |
Volume (vol) | vol.97 |
Number (no) | 357 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |