Presentation 2002/6/8
Realization of high-quality thick AlGaN layers and application of UV devices
Motoaki IWAYA, Shun TAKANAMI, Atsushi MIYAZAKI, Tomoaki SANO, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI,
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Abstract(in English) We reported the new growth technique for realization of low threading dislocation density and crack-free Al_xGa_<1-x>N films in the whole area. UV-LED on the newly developed AlGaN layer showed high output power., having peak wavelength of 363 nm, a full width at half maximum as narrow as 4.8 nm and output power of 2.6 mW at 100 mA DC current injection.
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Keyword(in English) AlGaN / LT-AlN interlayer / dislocation / lateral growth / UV-LED
Paper # ED2002-106
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Committee ED
Conference Date 2002/6/8(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Realization of high-quality thick AlGaN layers and application of UV devices
Sub Title (in English)
Keyword(1) AlGaN
Keyword(2) LT-AlN interlayer
Keyword(3) dislocation
Keyword(4) lateral growth
Keyword(5) UV-LED
1st Author's Name Motoaki IWAYA
1st Author's Affiliation Faculty of Science and Technology, Meijo University()
2nd Author's Name Shun TAKANAMI
2nd Author's Affiliation Faculty of Science and Technology, Meijo University
3rd Author's Name Atsushi MIYAZAKI
3rd Author's Affiliation Faculty of Science and Technology, Meijo University
4th Author's Name Tomoaki SANO
4th Author's Affiliation Faculty of Science and Technology, Meijo University
5th Author's Name Satoshi KAMIYAMA
5th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
6th Author's Name Hiroshi AMANO
6th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
7th Author's Name Isamu AKASAKI
7th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
Date 2002/6/8
Paper # ED2002-106
Volume (vol) vol.102
Number (no) 116
Page pp.pp.-
#Pages 4
Date of Issue