| Presentation | 2002/6/6 The Heating Effect of the Ammonia Injector for the Growth of GaN Thin Films by Ammonia-MBE T. Shibata, S-W. Kim, M. Akatu, T. Yamada, K. Haga, T. Suzuki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We discussed the heating effect of ammonia injectors on the growth of GaN thin films by ammonia MBE. First we grew GaN thin film on GaAs substrate with GaNAs buffer layer using ammonia injector without heating Many Ga droplets observed on the surface of the grown sample. PL spectra showed only deep level emission. Then we grew the same structure using heating type ammonia injector. As a result, the density of Ga droplet decreased as the heater temperature increased. PL spectra of GaN thin film grown at the heater temperature of 185℃showed the emission around 380nm. The peak position of the emission is almost that of cubic-GaN. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ammonia-MBE / GaN thin films / GaAs substrate / GaNAs buffer / ammonia injector |
| Paper # | ED2002-57 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Heating Effect of the Ammonia Injector for the Growth of GaN Thin Films by Ammonia-MBE |
| Sub Title (in English) | |
| Keyword(1) | ammonia-MBE |
| Keyword(2) | GaN thin films |
| Keyword(3) | GaAs substrate |
| Keyword(4) | GaNAs buffer |
| Keyword(5) | ammonia injector |
| 1st Author's Name | T. Shibata |
| 1st Author's Affiliation | Nippon Institute of Techunology() |
| 2nd Author's Name | S-W. Kim |
| 2nd Author's Affiliation | Nippon Institute of Techunology |
| 3rd Author's Name | M. Akatu |
| 3rd Author's Affiliation | Nippon Institute of Techunology |
| 4th Author's Name | T. Yamada |
| 4th Author's Affiliation | Nippon Institute of Techunology:Chichibu fuji |
| 5th Author's Name | K. Haga |
| 5th Author's Affiliation | Nippon Institute of Techunology:Chichibu fuji |
| 6th Author's Name | T. Suzuki |
| 6th Author's Affiliation | Nippon Institute of Techunology |
| Date | 2002/6/6 |
| Paper # | ED2002-57 |
| Volume (vol) | vol.102 |
| Number (no) | 114 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |