Presentation 2001/9/10
Gas Sensors with porous thin film of zirconium phosphate
Shinya Kushida, seimei Shiratori,
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Abstract(in English) α-zirconium phosphate(α-ZrP), which is layered material, is changed to be the sheet particulates after the exfoliation in the interlayer by intercalating tetra butyl ammonium. By depositing the sheet particulates, porous materials are produced. On the other hand, when the sensing films of gas sensors have porous structure, gas sensors have high speed and highly sensitive response because of high gas diffusion. In this study, this sheet particulates were deposited on QCM by casting or sequential adsorption method and the fabricated with the sensing film was evaluated a gas ssensor for ammonia. This sensor is compared with gas sensors using normal α-ZrP. Under the 5ppm gas concentration of ammonia, sensor characterizations were measured. As the results, when the sheet particulates were used as the sensing films for the gas sensors, the response time decreased to be the half value and the sensitivity increased to be the twice value compared with the ones using normal α-ZrP. By measuring the sensors response when the gas concentration was changed from 5ppm to 30ppm, it was found that gas sensors using the sheet particulates showed linear response form 5ppm to 20ppm.
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Keyword(in English) layered material / intercalation / inorganic polymer / gas sensor / porous material / ammonia
Paper # ED2001-120 OME2001-69
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Committee ED
Conference Date 2001/9/10(1days)
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Paper Information
Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Gas Sensors with porous thin film of zirconium phosphate
Sub Title (in English)
Keyword(1) layered material
Keyword(2) intercalation
Keyword(3) inorganic polymer
Keyword(4) gas sensor
Keyword(5) porous material
Keyword(6) ammonia
1st Author's Name Shinya Kushida
1st Author's Affiliation Faculty of Science and Technology, Keio University()
2nd Author's Name seimei Shiratori
2nd Author's Affiliation Faculty of Science and Technology, Keio University
Date 2001/9/10
Paper # ED2001-120 OME2001-69
Volume (vol) vol.101
Number (no) 313
Page pp.pp.-
#Pages 6
Date of Issue