Presentation 2001/5/30
Sb and Bi passivation effect on GaAs
Nobuhiro Kuroda, Hideaki Ikoma,
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Abstract(in English) Sb and Bi passivation effects on GaAs (100) surface were investigated. Good I-V characteristics with low reverse leakage current and high Schottky barrier height were obtained, when Sb-and Bi-layer thicknesses were adequate. From XPS and SIMS data, passivation effects are considered to stem from Sb-and Bi-terminations of GaAs surface, removal of native oxide on GaAs and suppressions of Au (electrode) diffusion into GaAs with Sb and Bi layers. Uniform GaN/GaAs structures were obtained by plasma nitridation of Sb/GaAs sample.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaAs / Sb / Bi / passivation / GaN/GaAs / J-V characteristics
Paper # ED2001-51
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Committee ED
Conference Date 2001/5/30(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Sb and Bi passivation effect on GaAs
Sub Title (in English)
Keyword(1) GaAs
Keyword(2) Sb
Keyword(3) Bi
Keyword(4) passivation
Keyword(5) GaN/GaAs
Keyword(6) J-V characteristics
1st Author's Name Nobuhiro Kuroda
1st Author's Affiliation Science University of Tokyo()
2nd Author's Name Hideaki Ikoma
2nd Author's Affiliation Science University of Tokyo
Date 2001/5/30
Paper # ED2001-51
Volume (vol) vol.101
Number (no) 104
Page pp.pp.-
#Pages 5
Date of Issue