| Presentation | 2001/5/30 Contactless electrical characterization of SOI layers : SPV measurements with UV excitation A. En, K. Eguchi, S. Nakamura, M. Suhara, T. Okumura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Electrical properties of the SOI layers have been measured by means of the Kelvin method combined with the surface-photovoltage (SPV) measurements. With the use of ultraviolet light source for the SPV measurements, the surface band-bending of very thin SOI layers can be characterized. On the other hand, infrared-illumination is capable of searching deeper region, such as the buried oxide layer-substrate interface. In addition, SPV measurements for the Fe contaminated SOI wafers were also performed in order to evaluate the electrical properties changed by Fe contamination. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI wafer / Kelvin method / surface photovoltage / ultraviolet light / infrared light / Fe contamination |
| Paper # | ED2001-49 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2001/5/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Contactless electrical characterization of SOI layers : SPV measurements with UV excitation |
| Sub Title (in English) | |
| Keyword(1) | SOI wafer |
| Keyword(2) | Kelvin method |
| Keyword(3) | surface photovoltage |
| Keyword(4) | ultraviolet light |
| Keyword(5) | infrared light |
| Keyword(6) | Fe contamination |
| 1st Author's Name | A. En |
| 1st Author's Affiliation | Graduate School of Engineering, Tokyo Metropolitan University() |
| 2nd Author's Name | K. Eguchi |
| 2nd Author's Affiliation | Graduate School of Engineering, Tokyo Metropolitan University |
| 3rd Author's Name | S. Nakamura |
| 3rd Author's Affiliation | Graduate School of Engineering, Tokyo Metropolitan University |
| 4th Author's Name | M. Suhara |
| 4th Author's Affiliation | Graduate School of Engineering, Tokyo Metropolitan University |
| 5th Author's Name | T. Okumura |
| 5th Author's Affiliation | Graduate School of Engineering, Tokyo Metropolitan University |
| Date | 2001/5/30 |
| Paper # | ED2001-49 |
| Volume (vol) | vol.101 |
| Number (no) | 104 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |