| Presentation | 2001/5/18 Fabrication and characterization of Si quantum well structures Takuma Ishihara, Masanori Iwasaki, Toshiaki Tsuchiya, Yasuhiko Ishikawa, Michiharu Tabe, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Ultrathin Si/SiO_2 double barrier structures were fabricated using a silicon-on-insulator (SOI) wafer with an ultrathin thermally-grown buried SiO_2 layer, which was fabricated in our laboratory by a wafer bonding technique. I-V measurements for a sample with -5nm-thick Si showed monotonous increase of the current with increasing the applied voltage, while, for a sample with ～2nm-thick Si, several inflections were observed in the I-V curves. A negative differential resistance was also observed, suggesting the resonant tunneling of electrons through the ultrathin Si layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Si / SiO_2 / SOI / double barrier structure / negative differential resistance / resonant tunneling |
| Paper # | ED2001-43,CPM2001-30,SDM2001-43 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2001/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and characterization of Si quantum well structures |
| Sub Title (in English) | |
| Keyword(1) | Si |
| Keyword(2) | SiO_2 |
| Keyword(3) | SOI |
| Keyword(4) | double barrier structure |
| Keyword(5) | negative differential resistance |
| Keyword(6) | resonant tunneling |
| 1st Author's Name | Takuma Ishihara |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Masanori Iwasaki |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Toshiaki Tsuchiya |
| 3rd Author's Affiliation | Shimane University |
| 4th Author's Name | Yasuhiko Ishikawa |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Michiharu Tabe |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2001/5/18 |
| Paper # | ED2001-43,CPM2001-30,SDM2001-43 |
| Volume (vol) | vol.101 |
| Number (no) | 79 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |