Presentation 2001/2/22
Transport characteristics of silicon single-electron transistors with gate oxides formed by LP-CVD
Masumi Saitoh, Nobuyoshi Takahashi, Toshiro Hiramoto,
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Abstract(in English) We fabricated silicon point-contact channel MOSFETs with gate oxides formed by LP-CVD and successfully demonstrated Coulomb blockade oscillations at room temperature. In one device, the peak-to-valley current ratio of Coulomb blockade oscillations at room temperature is about 2, and single-electron addition energy is as large as 251 meV. In another device, staircase feature due to discrete quantum levels in a dot is observed at low temperatures. The formation mechanisms of silicon dot and tunnel barriers are not clear at present, calling for further investigation.
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Keyword(in English) silicon single-electron transistor / Coulomb blockade oscillations / room temperature operation / ultrasmall quantum dot / quantum levels / staircase feature
Paper # ED2000-262,SDM2000-216
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Committee ED
Conference Date 2001/2/22(1days)
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Language JPN
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Title (in English) Transport characteristics of silicon single-electron transistors with gate oxides formed by LP-CVD
Sub Title (in English)
Keyword(1) silicon single-electron transistor
Keyword(2) Coulomb blockade oscillations
Keyword(3) room temperature operation
Keyword(4) ultrasmall quantum dot
Keyword(5) quantum levels
Keyword(6) staircase feature
1st Author's Name Masumi Saitoh
1st Author's Affiliation Institute of Industrial Science, the University of Tokyo()
2nd Author's Name Nobuyoshi Takahashi
2nd Author's Affiliation Institute of Industrial Science, the University of Tokyo
3rd Author's Name Toshiro Hiramoto
3rd Author's Affiliation Institute of Industrial Science, the University of Tokyo:VLSI Design and Education Center, the University of Tokyo
Date 2001/2/22
Paper # ED2000-262,SDM2000-216
Volume (vol) vol.100
Number (no) 642
Page pp.pp.-
#Pages 6
Date of Issue