Presentation 2001/2/21
Fabrication of InGaAs Ridge Quantum Structures Grown by Selective MBE and their Device Applications
T Muranaka, A Ito, C Jiang, H Hasegawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) InGaAs quantum wires (QWRS)-and quantum dots (QDs)-based network structures were successfully formed by the selective molecular beam epitaxial (MBE) growth on the various kinds of patterned InP substrates. Efforts were made to characterize and optimize an oxide removal process for the InP surface using atomic hydrogen cleaning. Under the optimum low-temperature atomic hydrogen cleaning, surface stoichiometry could be maintained and realized on an atomically flat InGaAs/InP interface. This, combined with other efforts, has led to the formation of uniform InGaAs quantum structures with good optical properties. Magnetotransport measurements showed that the strong electron confinement of 13 meV was realized in QWR and the effective width of QWR could be controlled by Schottky wrap gate (WPG). New attempts were made to fabricate single eletron transistor (SET) using QWR-QD coupled structures.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Selective MBE / InP / Quantum wire / Quantum dot / Uniformity of structures / Electrical property
Paper # ED2000-245,SDM2000-199
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Committee ED
Conference Date 2001/2/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of InGaAs Ridge Quantum Structures Grown by Selective MBE and their Device Applications
Sub Title (in English)
Keyword(1) Selective MBE
Keyword(2) InP
Keyword(3) Quantum wire
Keyword(4) Quantum dot
Keyword(5) Uniformity of structures
Keyword(6) Electrical property
1st Author's Name T Muranaka
1st Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering Hokkaido University()
2nd Author's Name A Ito
2nd Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering Hokkaido University
3rd Author's Name C Jiang
3rd Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering Hokkaido University
4th Author's Name H Hasegawa
4th Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering Hokkaido University
Date 2001/2/21
Paper # ED2000-245,SDM2000-199
Volume (vol) vol.100
Number (no) 641
Page pp.pp.-
#Pages 7
Date of Issue