| Presentation | 2001/2/21 Fabrication and characterization of periodic multiatomic step structures on patterned vicinal substrates and its applications Yasuhiro ODA, Toshifumi HARADA, Junichi MOTOHISA, Takashi FUKUI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a method to fabricate various kind of semiconductor nano-structures using self-organized method in MOVPE crystal growth on patterned GaAs(001) vicinal substrates Periodic mutiatomic step structures are formed on the patterned vicinal substrate misoriented towards the [-110] direction with a line & space pattern along the [11] direction. In A crossed line & space pattern, square scale structures can be formed with crossed multiatomic steps. We found that growth rate was different between step edges and terrace regions on the surface of these structures. These results demonstrated that it is possible to fabricate various kind of quantum structures with controllability of periodicity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaAs(001) vicinal substrate / patterned substrate / step bunching / quantum structure MOVPE |
| Paper # | ED2000-244,SDM2000-198 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2001/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and characterization of periodic multiatomic step structures on patterned vicinal substrates and its applications |
| Sub Title (in English) | |
| Keyword(1) | GaAs(001) vicinal substrate |
| Keyword(2) | patterned substrate |
| Keyword(3) | step bunching |
| Keyword(4) | quantum structure MOVPE |
| 1st Author's Name | Yasuhiro ODA |
| 1st Author's Affiliation | Research Center for Interface Quantum Electronics Hokkaido University() |
| 2nd Author's Name | Toshifumi HARADA |
| 2nd Author's Affiliation | Research Center for Interface Quantum Electronics Hokkaido University |
| 3rd Author's Name | Junichi MOTOHISA |
| 3rd Author's Affiliation | Research Center for Interface Quantum Electronics Hokkaido University |
| 4th Author's Name | Takashi FUKUI |
| 4th Author's Affiliation | Research Center for Interface Quantum Electronics Hokkaido University |
| Date | 2001/2/21 |
| Paper # | ED2000-244,SDM2000-198 |
| Volume (vol) | vol.100 |
| Number (no) | 641 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |