Presentation 2000/5/11
Crystalline quality of AlGaInN quaternary alloys grown by MOVPE
Masayoshi Kosaki, Youhei Yukawa, Michihiko Kariya, Shugo Nitta, Shigeo Yamaguchi, Hisaki Kato, Hiroshi Amano, Isamu Akasaki,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) AlGaInN quaternry alloys various composition were grown by MOVPE. High resolution X-ray diffraction measurement show that crystalline quality of AlGaInN quaternary alloys is comparable to that of the underlying GaN layer.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaInN quaternary alloys / mosaicity / tilt / twist
Paper # ED2000-17, CPM2000-2, SDM2000-17
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Committee ED
Conference Date 2000/5/11(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Crystalline quality of AlGaInN quaternary alloys grown by MOVPE
Sub Title (in English)
Keyword(1) AlGaInN quaternary alloys
Keyword(2) mosaicity
Keyword(3) tilt
Keyword(4) twist
1st Author's Name Masayoshi Kosaki
1st Author's Affiliation Department of Electrical and Electronic Engineering, Meijo University()
2nd Author's Name Youhei Yukawa
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Meijo University
3rd Author's Name Michihiko Kariya
3rd Author's Affiliation Department of Electrical and Electronic Engineering, Meijo University
4th Author's Name Shugo Nitta
4th Author's Affiliation Department of Electrical and Electronic Engineering, Meijo University
5th Author's Name Shigeo Yamaguchi
5th Author's Affiliation High-Tech Research Center, Meijo University
6th Author's Name Hisaki Kato
6th Author's Affiliation Department of Electrical and Electronic Engineering, Meijo University
7th Author's Name Hiroshi Amano
7th Author's Affiliation Department of Materials Science and Technology, Meijo University : High-Tech Research Center, Meijo University
8th Author's Name Isamu Akasaki
8th Author's Affiliation Department of Materials Science and Technology, Meijo University : High-Tech Research Center, Meijo University
Date 2000/5/11
Paper # ED2000-17, CPM2000-2, SDM2000-17
Volume (vol) vol.100
Number (no) 57
Page pp.pp.-
#Pages 6
Date of Issue