| Presentation | 2000/7/21 Noncontact evaluation of surface and interface of SOI wafers K. Eguchi, A. En, M. Suhara, T. Okumura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Although the electrical characterization of the top Si layer of the silicon-on-insulator(SOI) structure is very important, the conventional techniques such as DLTS require the electrode formation process. In this paper, we show the Kelvin method combining with the surface-photovoltage(SPV) measurements is capable of determining electrical properties of the surface as well as the near-surface region of the SOI without any device preparation process and completely in a nondestructive way. The measured contact potential difference is very sensitive to the surface condition; the atomic smoothness of the surface becomese, the heigher CPD is measured. Using a metal-coated optical fiber as a probe, we have tried to improve in the spatial resolution. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI wafers / Kelvin method / surface-photovoltage / Contact Potential Difference / atomic smoothness / optical fiber probe |
| Paper # | ED2000-106 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/7/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Noncontact evaluation of surface and interface of SOI wafers |
| Sub Title (in English) | |
| Keyword(1) | SOI wafers |
| Keyword(2) | Kelvin method |
| Keyword(3) | surface-photovoltage |
| Keyword(4) | Contact Potential Difference |
| Keyword(5) | atomic smoothness |
| Keyword(6) | optical fiber probe |
| 1st Author's Name | K. Eguchi |
| 1st Author's Affiliation | Department of Electrical Engineering, Tokyo Metropolitan University() |
| 2nd Author's Name | A. En |
| 2nd Author's Affiliation | Department of Electrical Engineering, Tokyo Metropolitan University |
| 3rd Author's Name | M. Suhara |
| 3rd Author's Affiliation | Department of Electrical Engineering, Tokyo Metropolitan University |
| 4th Author's Name | T. Okumura |
| 4th Author's Affiliation | Department of Electrical Engineering, Tokyo Metropolitan University |
| Date | 2000/7/21 |
| Paper # | ED2000-106 |
| Volume (vol) | vol.100 |
| Number (no) | 236 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |