| Presentation | 2000/6/23 ED2000-86 / SDM2000-86 Fabrication and Device Application of Surface Acoustic Wave coupled with Semiconductor C. Kaneshiro, T. Suda, Y. Aoki, C. Hong, K. Koh, K. Hohkawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The co-integration of surface acoustic wave (SAW) devices with semiconductor devices is very attractive for signal processing devices such as a charge transfer device, an amplifier and a convolver. We fabricated SAW devices coupled with semiconductor by using an epitaxial lift off (ELO) technique. We studied basic characteristics of the interaction between SAW and optically induced carriers in semiconductor by using test devices. From the experimental results of the insertion loss and phase shift, SAW propagation is controlled by optically induced carriers. The optically induced carriers are transferred by SAW. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SAW device / ELO process / semiconductor |
| Paper # | ED2000-86,SDM2000-86 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-86 / SDM2000-86 Fabrication and Device Application of Surface Acoustic Wave coupled with Semiconductor |
| Sub Title (in English) | |
| Keyword(1) | SAW device |
| Keyword(2) | ELO process |
| Keyword(3) | semiconductor |
| 1st Author's Name | C. Kaneshiro |
| 1st Author's Affiliation | Kanagawa Institute of Technology() |
| 2nd Author's Name | T. Suda |
| 2nd Author's Affiliation | Kanagawa Institute of Technology |
| 3rd Author's Name | Y. Aoki |
| 3rd Author's Affiliation | Kanagawa Institute of Technology |
| 4th Author's Name | C. Hong |
| 4th Author's Affiliation | Kanagawa Institute of Technology |
| 5th Author's Name | K. Koh |
| 5th Author's Affiliation | Kanagawa Institute of Technology |
| 6th Author's Name | K. Hohkawa |
| 6th Author's Affiliation | Kanagawa Institute of Technology |
| Date | 2000/6/23 |
| Paper # | ED2000-86,SDM2000-86 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |