Presentation 2000/6/23
ED2000-85 / SDM2000-85 Deep sub-μm Scale Photoluminescence Image of Wide Bandgap Materials by Cryogenic Scanning Microscope
Masahiro Yoshimoto, Junji Saraie,
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Abstract(in English) A novel photoluminescence (PL) microscope using a conventional optical system has been developed to obtain monochromated PL mapping at a low temperature down to 15 K with a spatial resolution in sub-μm range. The objective and the cooled sample were put in the identical vacuum chamber in order to take thermal insulation between them. The spatial resolution of the microscope at a low temperature was confirmed to be almost equal to the theoretical limit expected from numerical aperture, i. e., 0.3 μm at a wavelength of 488 nm. A monochromated PL image at a wavelength of 666 nm for GaAs_<0.67>P_<0.33> epilayer on GaP was demonstrated with a spatial resolution of 0.5 μm at 20 K. The influence of a surface defect on an excitonic PL emission of 4H-SiC was discussed based on a PL image.
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Keyword(in English) microscopic photoluminescence / cryogenic temperature / deep-submicron resolution / SiC / GaAsP
Paper # ED2000-85,SDM2000-85
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Committee ED
Conference Date 2000/6/23(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) ED2000-85 / SDM2000-85 Deep sub-μm Scale Photoluminescence Image of Wide Bandgap Materials by Cryogenic Scanning Microscope
Sub Title (in English)
Keyword(1) microscopic photoluminescence
Keyword(2) cryogenic temperature
Keyword(3) deep-submicron resolution
Keyword(4) SiC
Keyword(5) GaAsP
1st Author's Name Masahiro Yoshimoto
1st Author's Affiliation Dept. Electronics and Information Science, Kyoto Institute of Technology()
2nd Author's Name Junji Saraie
2nd Author's Affiliation Dept. Electronics and Information Science, Kyoto Institute of Technology
Date 2000/6/23
Paper # ED2000-85,SDM2000-85
Volume (vol) vol.100
Number (no) 149
Page pp.pp.-
#Pages 6
Date of Issue