| Presentation | 2000/6/23 ED2000-84 / SDM2000-84 Characterization of semiconductor structures in the VUV wavelength range using spectroscopic ellipsometry and spectroscopic photometry. Pierre BOHER, Jean Philippe PIEL, Patrick EVRARD, Christophe DEFRANOUX, Jean Louis STEHLE, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new generation of spectroscopic ellipsometer capable to work down to 145nm is presented. Included in a purged glove box to reduce the oxygen and water contamination in the part per million ranges, the system can make spectroscopic ellipsometry and spectroscopic photomerty in the wavelength range 145-700nm. Including a premonochromator in the polarizer arm to avoid photo bleaching, the optical setup works in rotating analyzer configuration to minimize the parastic polarization. Experimental results on different kinds of materials for the microelectronics are presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Spectroscopic ellipsometry / photometry / VUV / semiconductors |
| Paper # | ED2000-84,SDM2000-84 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-84 / SDM2000-84 Characterization of semiconductor structures in the VUV wavelength range using spectroscopic ellipsometry and spectroscopic photometry. |
| Sub Title (in English) | |
| Keyword(1) | Spectroscopic ellipsometry |
| Keyword(2) | photometry |
| Keyword(3) | VUV |
| Keyword(4) | semiconductors |
| 1st Author's Name | Pierre BOHER |
| 1st Author's Affiliation | SOPRA() |
| 2nd Author's Name | Jean Philippe PIEL |
| 2nd Author's Affiliation | SOPRA |
| 3rd Author's Name | Patrick EVRARD |
| 3rd Author's Affiliation | SOPRA |
| 4th Author's Name | Christophe DEFRANOUX |
| 4th Author's Affiliation | SOPRA |
| 5th Author's Name | Jean Louis STEHLE |
| 5th Author's Affiliation | SOPRA |
| Date | 2000/6/23 |
| Paper # | ED2000-84,SDM2000-84 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |