| Presentation | 2000/6/23 ED2000-80 / SDM2000-80 MOS Memory Using Si Nanocrystals Formed by Wet Etching of Poly-Silicon Along Grain Boundaries Seong-jong Yoo, Jongho Lee, Hyungcheol Shin, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The nanocrystal memory is the most promising candidate of post giga-bit EEPROM since it has some good properties as follows : fast and low-voltage operation using direct tunneling mechanism due to thin gate dielectrics, good nonvolatility due to suppression of charge loss between dots as storage nodes, and simple structure of one transistor-one cell. So it is so important to form nanocrystals. In this paper, a new method to form nanocrystals using wet etching is proposed and characteristics of the memory using this method is analyzed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si / grain boundaries / wet etching / nanocrystal memory |
| Paper # | ED2000-80,SDM2000-80 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | KOR |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-80 / SDM2000-80 MOS Memory Using Si Nanocrystals Formed by Wet Etching of Poly-Silicon Along Grain Boundaries |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si |
| Keyword(2) | grain boundaries |
| Keyword(3) | wet etching |
| Keyword(4) | nanocrystal memory |
| 1st Author's Name | Seong-jong Yoo |
| 1st Author's Affiliation | Dept. of EECS, KAIST() |
| 2nd Author's Name | Jongho Lee |
| 2nd Author's Affiliation | School of Electrical Eng., Wonkwang Univ. |
| 3rd Author's Name | Hyungcheol Shin |
| 3rd Author's Affiliation | Dept. of EECS, KAIST |
| Date | 2000/6/23 |
| Paper # | ED2000-80,SDM2000-80 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |