| Presentation | 2000/6/23 ED2000-79 / SDM2000-79 Crystal Growth of Low-Temperature Processed Poly-Si by Excimer Laser Annealing : Dependences of Poly-Si Grain on Energy Density and Shot Number Naoto Matsuo, Naoya Kawamoto, Ryouhei Taguchi, Hisashi Abe, Tomoyuki Nouda, Hiroki Hamada, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper examines the characteristics of the poly-Si grains formed by ELA with the energy density from 75 mJ/cm^2 to 400 mJ/cm^2, and discusses the change of the crystal growth mechanism of the recrystallized poly-Si dependent on the energy density. For the energy density from 250 mJ/cm^2 to 350 mJ/cm^2, the disk-shaped grains are observed. The dependences of the area ratio of disk-shaped grain both on the energy density and on the shot number are examined. From these results, the role of the disk-shaped grains for the change of the crystal growth mechanism dependent on the energy density is clarified. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si grains / ELA / disk-shaped grains / crystal growth mechanism |
| Paper # | ED2000-79,SDM2000-79 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-79 / SDM2000-79 Crystal Growth of Low-Temperature Processed Poly-Si by Excimer Laser Annealing : Dependences of Poly-Si Grain on Energy Density and Shot Number |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si grains |
| Keyword(2) | ELA |
| Keyword(3) | disk-shaped grains |
| Keyword(4) | crystal growth mechanism |
| 1st Author's Name | Naoto Matsuo |
| 1st Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University() |
| 2nd Author's Name | Naoya Kawamoto |
| 2nd Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| 3rd Author's Name | Ryouhei Taguchi |
| 3rd Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| 4th Author's Name | Hisashi Abe |
| 4th Author's Affiliation | Microelectronics Research Center, SANYO Electric Co., Ltd |
| 5th Author's Name | Tomoyuki Nouda |
| 5th Author's Affiliation | Microelectronics Research Center, SANYO Electric Co., Ltd |
| 6th Author's Name | Hiroki Hamada |
| 6th Author's Affiliation | Microelectronics Research Center, SANYO Electric Co., Ltd |
| Date | 2000/6/23 |
| Paper # | ED2000-79,SDM2000-79 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |