| Presentation | 2000/6/23 ED2000-78 / SDM2000-78 High performance CMOS technology by using low temperature Poly-Si TFTs on a glass substrate Michiko Takei, Tatsuya Uematsu, Kenich Yoshino, Fumiyo Takeuchi, Yasuyoshi Mishima, Nobuo Sasaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A high performance TFT CMOS technology on a glass substrate (300mmx300mm) is developed with the laser-crystallized low-temperature poly-Si transistors fabricated below 450°C. Maximum operating frequency of 133MHz is obtained at a supply voltage of 5 V for a 40 stage shift-ragister with 1μm channel length. Propagation delay time of 0.18ns is obtained for a 121 stage CMOS ring oscillator with 0.5 μm channel length. This technology will pave the way for "system LCD". |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | low temperature poly-Si / TFT / high speed / low power dissipation / system LCD |
| Paper # | ED2000-78,SDM2000-78 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-78 / SDM2000-78 High performance CMOS technology by using low temperature Poly-Si TFTs on a glass substrate |
| Sub Title (in English) | |
| Keyword(1) | low temperature poly-Si |
| Keyword(2) | TFT |
| Keyword(3) | high speed |
| Keyword(4) | low power dissipation |
| Keyword(5) | system LCD |
| 1st Author's Name | Michiko Takei |
| 1st Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd.() |
| 2nd Author's Name | Tatsuya Uematsu |
| 2nd Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd. |
| 3rd Author's Name | Kenich Yoshino |
| 3rd Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd. |
| 4th Author's Name | Fumiyo Takeuchi |
| 4th Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd. |
| 5th Author's Name | Yasuyoshi Mishima |
| 5th Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd. |
| 6th Author's Name | Nobuo Sasaki |
| 6th Author's Affiliation | LCD Laboratories. Fujitsu Laboratories Co. Ltd. |
| Date | 2000/6/23 |
| Paper # | ED2000-78,SDM2000-78 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |