Presentation | 2000/6/23 ED2000-77 / SDM2000-77 Reliability of Low Temperature Poly-Silicon Thin Film Transistors under Dynamic Stress Y. Uraoka, T. Hatayama, T. Fuyuki, T. Kawamura, Y. Tsuchihashi, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Reliability of low temperature poly-Si under dynamic stress was evaluated. Decrease of mobility and ON current was observed under the dynamic stress. We have found that the degradation depends strongly on falling time and number of repetition of pulse. With the decrease of falling time, degradation was accelerated. From the analysis of emission microscope, photon emission was observed under dynamic stress. Based on these results, degradation is considered to occur when the gate pulse falls. When gate pulse falls, hot electrons will be generated making electron traps in the poly-silicon. We have confirmed that the reliability is improved by adopting LDD structure. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Low Temperature Poly-Si / Reliability / Hot Electron / System On Panel |
Paper # | ED2000-77,SDM2000-77 |
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Conference Information | |
Committee | ED |
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Conference Date | 2000/6/23(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | ED2000-77 / SDM2000-77 Reliability of Low Temperature Poly-Silicon Thin Film Transistors under Dynamic Stress |
Sub Title (in English) | |
Keyword(1) | Low Temperature Poly-Si |
Keyword(2) | Reliability |
Keyword(3) | Hot Electron |
Keyword(4) | System On Panel |
1st Author's Name | Y. Uraoka |
1st Author's Affiliation | Graduate School of Materials Science Nara Institute of Science and Technology() |
2nd Author's Name | T. Hatayama |
2nd Author's Affiliation | Graduate School of Materials Science Nara Institute of Science and Technology |
3rd Author's Name | T. Fuyuki |
3rd Author's Affiliation | Graduate School of Materials Science Nara Institute of Science and Technology |
4th Author's Name | T. Kawamura |
4th Author's Affiliation | LCD Division, Matsushita Electric Industrial Co. Ltd |
5th Author's Name | Y. Tsuchihashi |
5th Author's Affiliation | LCD Division, Matsushita Electric Industrial Co. Ltd |
Date | 2000/6/23 |
Paper # | ED2000-77,SDM2000-77 |
Volume (vol) | vol.100 |
Number (no) | 149 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |