| Presentation | 2000/6/23 ED2000-76 / SDM2000-76 SMC of a-Si in an electric field and its application to TFTs Jin Jang, Soo Young Yoon, Seong Jin Park, Kyung Ho Kim, Kyu Sik Cho, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We studied the Ni-silicide mediated crystallization of hydrogenated amorphous silicon (a-Si : H) in the presence of an electric filed and its application to high performance thin film transistors. In the initial stage of thermal annealing of a-Si : H having Ni particles on it, the NiSi_2 precipitate was formed at temperatures less than 400°C and act as nuclei sites. Needlelike crystallites are developed as a result of the migration of NiSi_2 precipitates in a-S : H network. The crystallization speed increases with increasing the electric field strength, which is due to the accelerated migration of NiSi_2 precipitates in a-Si : H network. The a-Si : H was fully crystallized at 500°C within 10 min. A poly-Si TFT using the Ni-SMC poly-Si had a field-effect mobility of 120 cm^2/Vs and a threshold voltage of 1.5V, and a sub-threshold slope of 0.5 V/dec. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicide mediated crystallization / polycrystalline silicon / thin film transistor |
| Paper # | ED2000-76,SDM2000-76 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | KOR |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-76 / SDM2000-76 SMC of a-Si in an electric field and its application to TFTs |
| Sub Title (in English) | |
| Keyword(1) | Silicide mediated crystallization |
| Keyword(2) | polycrystalline silicon |
| Keyword(3) | thin film transistor |
| 1st Author's Name | Jin Jang |
| 1st Author's Affiliation | Department of Physics, Kyung Hee University() |
| 2nd Author's Name | Soo Young Yoon |
| 2nd Author's Affiliation | Department of Physics, Kyung Hee University |
| 3rd Author's Name | Seong Jin Park |
| 3rd Author's Affiliation | Department of Physics, Kyung Hee University |
| 4th Author's Name | Kyung Ho Kim |
| 4th Author's Affiliation | Department of Physics, Kyung Hee University |
| 5th Author's Name | Kyu Sik Cho |
| 5th Author's Affiliation | Department of Physics, Kyung Hee University |
| Date | 2000/6/23 |
| Paper # | ED2000-76,SDM2000-76 |
| Volume (vol) | vol.100 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |