| Presentation | 2000/6/21 ED2000-53 / SDM2000-53 A Novel Integration Technology for Gigabit DRAM with 0.115μm Design Rule Hyunpil Noh, Sangdon Lee, Woncheol Cho, Jongrim Lee, Gucheol Jeong, Sung-keun Chang, Hyunjo Yang, Dongseok Kim, Junki Kim, Jisoo Park, Junsik Lee, Jinwon Park, Hee-koo Yoon, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel integration technology employing selective-epitaxial plug scheme prior to ILD1 and Pre-Poly Plug scheme for storage node contacts prior to ILD2 has been tested using E-Beam direct-writing tool. Shallow trench isolation and MIM capacitor scheme were adopted. Epi-Si plug selectively grown on active open areas reduce the contact resistance and improves its uniformity compared to conventional poly plug. Pre-poly-plug scheme for storage node contacts before ILD2 gapfill under COB type capacitor will have advantages in less thermal budget in ILD2 gapfill and reduced bitline capacitance. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Si Epi Plug / Pre Poly Plug / Contact resistance / Thermal budget |
| Paper # | ED2000-53,SDM2000-53 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2000/6/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ED2000-53 / SDM2000-53 A Novel Integration Technology for Gigabit DRAM with 0.115μm Design Rule |
| Sub Title (in English) | |
| Keyword(1) | Si Epi Plug |
| Keyword(2) | Pre Poly Plug |
| Keyword(3) | Contact resistance |
| Keyword(4) | Thermal budget |
| 1st Author's Name | Hyunpil Noh |
| 1st Author's Affiliation | Hyundai Microelectronics Co, LTD.() |
| 2nd Author's Name | Sangdon Lee |
| 2nd Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 3rd Author's Name | Woncheol Cho |
| 3rd Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 4th Author's Name | Jongrim Lee |
| 4th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 5th Author's Name | Gucheol Jeong |
| 5th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 6th Author's Name | Sung-keun Chang |
| 6th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 7th Author's Name | Hyunjo Yang |
| 7th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 8th Author's Name | Dongseok Kim |
| 8th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 9th Author's Name | Junki Kim |
| 9th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 10th Author's Name | Jisoo Park |
| 10th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 11th Author's Name | Junsik Lee |
| 11th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 12th Author's Name | Jinwon Park |
| 12th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| 13th Author's Name | Hee-koo Yoon |
| 13th Author's Affiliation | Hyundai Microelectronics Co, LTD. |
| Date | 2000/6/21 |
| Paper # | ED2000-53,SDM2000-53 |
| Volume (vol) | vol.100 |
| Number (no) | 147 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |