Presentation 1999/7/22
New SOI CBiCMOS Structure for High Speed Application
Yue-Sheng ZHENG, Tanemasa ASANO,
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Abstract(in English) A CBiCMOS device has been newly developed. The device consists of bipolar transistors, which amplify MOSFET currents, built-in the drain regions of each MOSFET of the CMOS using the poly-Si diffusion technology. The device has been fabricated using a reverse bonding and etching back technique to form the fully-isolated (SOI), gate-bottom, collector-top structure which facilitates high speed operation. MOSFET's current amplification and inverter operation of the new device have been experimentally verified.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) merged transistor / SOI / BiMOS / wafer bonding / CBiCMOS
Paper # ED99-105
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Committee ED
Conference Date 1999/7/22(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) New SOI CBiCMOS Structure for High Speed Application
Sub Title (in English)
Keyword(1) merged transistor
Keyword(2) SOI
Keyword(3) BiMOS
Keyword(4) wafer bonding
Keyword(5) CBiCMOS
1st Author's Name Yue-Sheng ZHENG
1st Author's Affiliation Center for Microelectronic Systems, Kyushu Institute of Technology()
2nd Author's Name Tanemasa ASANO
2nd Author's Affiliation Center for Microelectronic Systems, Kyushu Institute of Technology
Date 1999/7/22
Paper # ED99-105
Volume (vol) vol.99
Number (no) 229
Page pp.pp.-
#Pages 6
Date of Issue