Presentation | 1999/7/22 New SOI CBiCMOS Structure for High Speed Application Yue-Sheng ZHENG, Tanemasa ASANO, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A CBiCMOS device has been newly developed. The device consists of bipolar transistors, which amplify MOSFET currents, built-in the drain regions of each MOSFET of the CMOS using the poly-Si diffusion technology. The device has been fabricated using a reverse bonding and etching back technique to form the fully-isolated (SOI), gate-bottom, collector-top structure which facilitates high speed operation. MOSFET's current amplification and inverter operation of the new device have been experimentally verified. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | merged transistor / SOI / BiMOS / wafer bonding / CBiCMOS |
Paper # | ED99-105 |
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Conference Information | |
Committee | ED |
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Conference Date | 1999/7/22(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | New SOI CBiCMOS Structure for High Speed Application |
Sub Title (in English) | |
Keyword(1) | merged transistor |
Keyword(2) | SOI |
Keyword(3) | BiMOS |
Keyword(4) | wafer bonding |
Keyword(5) | CBiCMOS |
1st Author's Name | Yue-Sheng ZHENG |
1st Author's Affiliation | Center for Microelectronic Systems, Kyushu Institute of Technology() |
2nd Author's Name | Tanemasa ASANO |
2nd Author's Affiliation | Center for Microelectronic Systems, Kyushu Institute of Technology |
Date | 1999/7/22 |
Paper # | ED99-105 |
Volume (vol) | vol.99 |
Number (no) | 229 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |