| Presentation | 1999/7/22 Optical Proximity Correction Using Diffused Aerial Image Model Hee-Bom Kim, Chang-Nam Ahn, Ji-Suk Hong, Hyoung-Soon Yune, Yung-Mo Koo, Ki-Ho Baik, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The simulation model which can be applied to correct optical proximity effect has to accurately predict the CD's for various patterns in shape and size within an acceptable computational time budget and with an easiness to calibrate parameters from experimental data. In this respect we compared the simulation results using the DAIM(Diffused Aerial Image Model) with experimental data for three types of patterns (line/space, isolated line and isolated space) with respect to their linearity. We found that DAIM has fine accuracy without any penalty in computational speed and also offers simplicity in analysis. We also found that the mask error effect becomes very significant as the pattern size gets smaller and thus makes the OPC (Optical Proximity Effect Correction) less effective. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED99-100 |
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| Committee | ED |
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| Conference Date | 1999/7/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optical Proximity Correction Using Diffused Aerial Image Model |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Hee-Bom Kim |
| 1st Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd.() |
| 2nd Author's Name | Chang-Nam Ahn |
| 2nd Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd. |
| 3rd Author's Name | Ji-Suk Hong |
| 3rd Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd. |
| 4th Author's Name | Hyoung-Soon Yune |
| 4th Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd. |
| 5th Author's Name | Yung-Mo Koo |
| 5th Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd. |
| 6th Author's Name | Ki-Ho Baik |
| 6th Author's Affiliation | Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd. |
| Date | 1999/7/22 |
| Paper # | ED99-100 |
| Volume (vol) | vol.99 |
| Number (no) | 229 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |