| Presentation | 1999/7/22 Sub-100nm Lithographic Performance of Novel Electron Beam Resist Sung-Eun Hong, Chi-Hyeong Roh, Jae-Chang Jung, Jae-Yong Ahn, Hyeong-Soo Kim, Ki-Ho Baik, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED99-99 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1999/7/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sub-100nm Lithographic Performance of Novel Electron Beam Resist |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Sung-Eun Hong |
| 1st Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd.() |
| 2nd Author's Name | Chi-Hyeong Roh |
| 2nd Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd. |
| 3rd Author's Name | Jae-Chang Jung |
| 3rd Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd. |
| 4th Author's Name | Jae-Yong Ahn |
| 4th Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd. |
| 5th Author's Name | Hyeong-Soo Kim |
| 5th Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd. |
| 6th Author's Name | Ki-Ho Baik |
| 6th Author's Affiliation | Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd. |
| Date | 1999/7/22 |
| Paper # | ED99-99 |
| Volume (vol) | vol.99 |
| Number (no) | 229 |
| Page | pp.pp.- |
| #Pages | 6 |
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