| Presentation | 1999/7/22 Thermal Oxidation Characteristics of Oxide Grown on Si Exposed to Nitrogen Plasma and its Reliability Akihiro Ikeda, Chika Fujiki, Kenichi Takagi, Yukinori Kuroki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thermal oxidation characteristics and reliability of SiO_2 grown on Si exposed to nitrogen plasma were evaluated, 110Å thick SiO_2 was grown with rapid thermal oxidation of 90sec without the nitrogen plasma exposure. While, SiO_2 thickness was 92Å and 61Å for the same thermal oxidation time with lightly and heavily plasma nitridation, respectively. This decreasing of SiO_2 growth rates might be associated to nitrogen atoms incorporated at SiO_2/Si by the nitrogen plasma exposure. For the SiO_2 without the nitrogen plasma exposure, tunneling current at -6MV/cm gate electric field was increased from -3.5A/cm^2 to -13.6A/cm^2 by the current stress of -5×10^<-7>A/cm^2 for 100sec. While, tunneling current was not increased by the same current stress for the lightly nitrided SiO_2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | plasma nitridation / rapid thermal oxidation / oxynitride / reliability |
| Paper # | ED99-82 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1999/7/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thermal Oxidation Characteristics of Oxide Grown on Si Exposed to Nitrogen Plasma and its Reliability |
| Sub Title (in English) | |
| Keyword(1) | plasma nitridation |
| Keyword(2) | rapid thermal oxidation |
| Keyword(3) | oxynitride |
| Keyword(4) | reliability |
| 1st Author's Name | Akihiro Ikeda |
| 1st Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University() |
| 2nd Author's Name | Chika Fujiki |
| 2nd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 3rd Author's Name | Kenichi Takagi |
| 3rd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 4th Author's Name | Yukinori Kuroki |
| 4th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| Date | 1999/7/22 |
| Paper # | ED99-82 |
| Volume (vol) | vol.99 |
| Number (no) | 229 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |