Presentation 1999/5/20
Effect of impurity in CuInSe_2 by ion implantation
T. Tanaka, A. Wakahara, T. Ohshima, H. Itoh, S. Okada, A. Yoshida,
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Abstract(in English) Recently CuInSe_2 and related chalcopyrites have been received much attention as a potential candidate for solar cell with high efficiency, low cost, and excellent stability. In this study, we have investigated the effect of Mg on the characteristics of CuInSe_2 thin films using ion implantation technique, in order to clarify the doping effect by extrinsic dopants. After annealing, all implanted films showed n-type conduction, and the carrier concentration was increased with increasing the Mg concentration. Conseqently it was found that Mg act as a donor in CuInSe_2 with the ionization energy of about 53meV
Keyword(in Japanese) (See Japanese page)
Keyword(in English) CuInSe_2 / doping / ion implantation / RF sputtering / chalcopyrite structure
Paper # ED99-38
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Committee ED
Conference Date 1999/5/20(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of impurity in CuInSe_2 by ion implantation
Sub Title (in English)
Keyword(1) CuInSe_2
Keyword(2) doping
Keyword(3) ion implantation
Keyword(4) RF sputtering
Keyword(5) chalcopyrite structure
1st Author's Name T. Tanaka
1st Author's Affiliation Department of Electrical and Electronic Engineering, Toyohashi University of Technology()
2nd Author's Name A. Wakahara
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Toyohashi University of Technology
3rd Author's Name T. Ohshima
3rd Author's Affiliation Japan Atomic Energy Research Institute
4th Author's Name H. Itoh
4th Author's Affiliation Japan Atomic Energy Research Institute
5th Author's Name S. Okada
5th Author's Affiliation Japan Atomic Energy Research Institute
6th Author's Name A. Yoshida
6th Author's Affiliation Department of Electrical and Electronic Engineering, Toyohashi University of Technology
Date 1999/5/20
Paper # ED99-38
Volume (vol) vol.99
Number (no) 63
Page pp.pp.-
#Pages 6
Date of Issue