| Presentation | 1999/4/23 Adsorption of Organic carbon and Growth of Native Oxide on Si Wafer Naoya KAWAMOTO, Naoto MATSUO, Daisuke AIHARA, Tatsuo FUKUOKA, Tadaki MIYOSHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To investigate the adsorption mechanism of organic carbon on Si surface, Si surface was examined by AFM and XPS, after dipping into the water which contains the organic carbon. The measurement data of Ra indicates that the geometrically uneven surface such as the step or microfacet does not to serve as the dominant adsorption site for the organic csrbon. The mesured data of C_IS and the thickness of the native oxide strongly indicates that the adsorption of the organic carbon has the close relationship with the native oxide growth. For the adsorption mechanism of the organic carbon, new model which assumes the field-enhancement due to the Coulomb's force was discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | organic carbon / adsorption / microroughness of Si surface / native oxide / Coulomb's force / field- enhanced |
| Paper # | ED99-16 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1999/4/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Adsorption of Organic carbon and Growth of Native Oxide on Si Wafer |
| Sub Title (in English) | |
| Keyword(1) | organic carbon |
| Keyword(2) | adsorption |
| Keyword(3) | microroughness of Si surface |
| Keyword(4) | native oxide |
| Keyword(5) | Coulomb's force |
| Keyword(6) | field- enhanced |
| 1st Author's Name | Naoya KAWAMOTO |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engirieering, Yamaguchi University() |
| 2nd Author's Name | Naoto MATSUO |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engirieering, Yamaguchi University |
| 3rd Author's Name | Daisuke AIHARA |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engirieering, Yamaguchi University |
| 4th Author's Name | Tatsuo FUKUOKA |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engirieering, Yamaguchi University |
| 5th Author's Name | Tadaki MIYOSHI |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engirieering, Yamaguchi University |
| Date | 1999/4/23 |
| Paper # | ED99-16 |
| Volume (vol) | vol.99 |
| Number (no) | 22 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |