| Presentation | 1994/5/20 Nondestructive Depth Profiling Using Soft X-ray Emission Spectroscopy -Study of Ni-silicide/Si hetero contact system- Shoichi Yamauchi, Motohiro Iwami, Hisayoshi Ohshima, Tadashi Hattori, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have paid attention to the valence band structure of metal- silicides, Si heterocontact system by using Soft X-ray Emission Spectroscopy:SXES.Nondestructive depth profiling analysis was performed by Incident Energy Variation(IEV)method. Furthermore,we have observed the influence of crystallographic relationship of Si substrate on the growth of Ni-silicide by using SXES.On Si(lll)substrate,NiSi and epitaxial NiSi_2 were formed,and NiSi and Si region were extended on Si(100)substrate,where both samples were treated same condition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SXES / valence band / nondestructive analysis / Ni-silicide / epitaxial growth |
| Paper # | ED94-28,CPM94-29 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nondestructive Depth Profiling Using Soft X-ray Emission Spectroscopy -Study of Ni-silicide/Si hetero contact system- |
| Sub Title (in English) | |
| Keyword(1) | SXES |
| Keyword(2) | valence band |
| Keyword(3) | nondestructive analysis |
| Keyword(4) | Ni-silicide |
| Keyword(5) | epitaxial growth |
| 1st Author's Name | Shoichi Yamauchi |
| 1st Author's Affiliation | Research Laboratories,Nippondenso Co.,Ltd.,() |
| 2nd Author's Name | Motohiro Iwami |
| 2nd Author's Affiliation | Research Laboratory for Surface Science,Faculty of Science,Okayama University |
| 3rd Author's Name | Hisayoshi Ohshima |
| 3rd Author's Affiliation | Research Laboratories,Nippondenso Co.,Ltd., |
| 4th Author's Name | Tadashi Hattori |
| 4th Author's Affiliation | Research Laboratories,Nippondenso Co.,Ltd., |
| Date | 1994/5/20 |
| Paper # | ED94-28,CPM94-29 |
| Volume (vol) | vol.94 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |